Keyence 7000N Digital Optical Microscope as Profilometer
The Keyence 7000N uses its automatic multi-focusing planes feature to measure the distance between focal planes for microscopic features. The microscope has magnification ranges from 20X to 2000X and uses either ring or coaxial illumination. It has an optional software package for surface profilometry and surface roughness measurements.
Linear and surface roughness parameters can be measured for a surface along a line or for a surface area. The 3-dimensionally focused surface can be referenced to a fitted plane for tilt correction or to fitted spheres or cylinders. The measured surface parameters are:
Sa, Arithmetic mean deviation
Sq, Root mean square deviation
Ssk, Skewness
Sku, Kurtosis
Sp, Maximum peak height
Sv, Maximum valley depth
Sz = Sp + Sv