Residual Gas Mass Spectroscopy

Residual Gas Mass Spectroscopy Specifications:

  • Stanford Research Systems RGA200 Residual Gas Analyzer
  • Mass Range: 1 to 200 amu
  • Mass Filter Type: Quadrupole
  • Detector Type: Faraday Cup and Electron Multiplier
  • Resolution: Greater than 0.5 amu at 10% peak height
  • Minimum Detectable Partial Pressure: 5 x 10-11 Torr with Faraday Cup
  • Minimum Detectable Partial Pressure: 5 x 10-14 Torr with Electron Multiplier
  • Operating Pressure Range: 10-4 Torr to UHV with Faraday Cup
  • Operating Pressure Range: 10-6 Torr to UHV with Electron Multiplier
  • Ionizer: Open, cylindrical symmetry ion source
  • Filament: Thoriated Iridium

Residual Gas Mass Spectroscopy Applications:

  • Detection of outgassed airborne silicone materials
  • Outgassing of water from materials
  • Identification of chemicals outgassed by materials
  • Chemical purity checks
  • Identification of volatile contaminants
  • Leak detection for vacuum systems

How does Residual Gas Mass Spectroscopy Work?:

The RGA efficiently identifies the chemical constituents of gases within a vacuum by ionizing the present gases, creating ions, and subsequently determining their mass-to-charge ratio.

A standard RGA is comprised of key components: the sensor, the interface box, and the controller.

Within the sensor, the RGA generates a stream of ions through gas collisions with electrons emitted from a hot cathode. These ions are then filtered based on their mass-to-charge ratio, denoted as m/z. The resulting output current serves as a measurement of the abundance of ions with a specific m/z that successfully pass through the filter. Detection of this current occurs at the detector, facilitated by either a Faraday cup or a Secondary Electron Multiplier.

The signals, processed initially by the interface electronics and subsequently by the control unit, generate a graphical representation on the x-axis depicting the m/z ratio, while the y-axis represents the corresponding ion current.

Stanford Research Systems RGA200 Residual Gas Analyzer (for Residual Gas Mass Spectroscopy)
Stanford Research Systems RGA200 Residual Gas Analyzer

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