An unusual form of underlayer moisture attack in a multi-layer anti-reflective coating in which the attack followed a rather random appearing path. In this case, diffusion rates are greatly aided by defects, so the path is likely one of maximal lattice defects such as might be found in a highly oxygen-deficient oxide.
An unusual form of underlayer moisture attack in a multi-layer anti-reflective coating in which the attack followed a rather random appearing path. In this case, diffusion rates are greatly aided by defects, so the path is likely one of maximal lattice defects such as might be found in a highly oxygen-deficient oxide.
