Schematic Diagram of the Monochromatic Small-Spot XPS System at AME
This schematic diagram shows the monochromatic small spot aluminum anode source XPS Surface Analysis System at Anderson Materials Evaluation, Inc. with variable size small spot x-ray irradiation of the sample. The system determines the energy of photoelectrons emitted from the sample using a hemispherical analyzer with a fast multichannel electron detector. The usual electron take-off angle is 35 degrees.
