Step Height Measurement for Thin Film or Coating Thickness - Anderson Materials Evaluation, Inc.Anderson Materials Evaluation, Inc.

Step Height Measurement of Metallization Films on Silicon Wafers

Anderson Materials Evaluation, Inc. sputter deposited a metal film on a silicon wafer with a mask in place. When the mask was removed, the step-height of the edge of the metal film is the thickness of the film. Two of the edge areas analyzed are shown below.

Step Height Measurement Example 1 — **Example 1:** The step height is 2.5 µm, so the film thickness is 2.5 µm.

Step height measurement of metal film deposited on Si wafer at an edge formed by use of a mask.

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